Modelling of Microfabrication Systems formatIsbn:Hardcover - 9783540002529 runoon ja Viroon

Name: Modelling of Microfabrication Systems formatIsbn:Hardcover - 9783540002529 runoon ja Viroon
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runoon ja Viroon

Italy in 19

UNESCO) aktiv gefördert

000 Einwohner der insgesamt ca

Modelling of Microfabrication Systems formatIsbn:Hardcover - 9783540002529 runoon ja ViroonThis is the first book to address modelling of systems that are important to the fabrication of three dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x ray lithography.

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